HORIBA Scientific Launches New UVISEL 2 VUV Versatile Spectroscopic Ellipsometer
24 Feb 2014

HORIBA Scientific, a leader in spectroscopic ellipsometry, is pleased to announce the launch of the UVISEL 2 VUV, a new generation of phase modulation spectroscopic ellipsometer for VUV measurements. UVISEL 2 VUV is the only spectroscopic ellipsometer on the market designed to deliver the fastest thin film measurements over the largest wavelength range, from 147 to 2100 nm.

The UVISEL 2 VUV is “a hybrid ellipsometer”, capable of operating in 2 modes: under nitrogen or primary vacuum. Its mechanical design is optimized for low nitrogen consumption down to 6L/min, and allows for fast sample loading, which takes less than two minutes. The choice of eight spot sizes is ideal for small area measurements, and the readily accessible chamber in front makes sample loading very convenient.

High sensitivity

The UVISEL 2 VUV provides high sensitivity at VUV wavelengths. It integrates dual high power energy sources, high throughput optics, a CaF2 photo-elastic modulator and two modern monochromators. Sample measurement takes less than 8 minutes from 147 to 850 nm with an excellent signal to noise ratio.

Reducing nitrogen consumption

The UVISEL 2 VUV revolutionizes the world of VUV ellipsometers by significantly reducing the nitrogen consumption and the time it takes to purge and measure samples.


DeltaPsi2 software


The well-known DeltaPsi2 software controls the UVISEL 2 VUV ellipsometer, offering powerful acquisition, modeling and reporting features. The user interface is intuitive and suitable for both research and industrial use.

“The UVISEL 2 VUV provides unmatched measurement speed and low operating costs, making it the ideal ellipsometer for the characterization of numerous thin film applications from 147 to 2100 nm”, said Jean-Paul Gaston, Ellipsometry Product Manager, HORIBA Jobin Yvon. The UVISEL 2 VUV ellipsometer can be customized and automated for production environment.

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HORIBA Jobin Yvon S.A.S.
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Sarah Thomas
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