“The addition of the MS-101 to the MS series fills a gap in our line of small-to-medium rotary vane pumps for industrial processes where chamber volumes and gas-flow requirements are lower but vacuum quality cannot be compromised,” said Giampaolo Levi, vice president and general manager of Agilent’s Vacuum Products Division. “The MS-101 enhances the MS series to provide a broad range of pumping speeds and capacities to match common as well as emerging processes.”
The MS series is known for a variety of high-capacity, single-stage, oil-lubricated rotary vane pumps. The rugged design and compact size of the MS-101 make it ideal for demanding industrial applications such as helium leak detection and electron beam welding. The MS-101 delivers unsurpassed performance among rotary vane pumps in the 100 m3 per hour range.
The MS series complements Agilent’s diffusion and turbo-molecular pump lines, which all together provide complete, performance-enhanced vacuum systems for industrial processes.