MKS Instruments Inc. Products

Real-Time Trace Impurity Detection The MultiGas™ Purity Analyzer is an FTIR based gas analyzer capable of ppb contaminant detection in high purity bulk process gases such as NH3, NF3, SiF4, and H2. The MultiGas™ Purity Analyzer is comp... Read more...

The MultiGas ™ 2030 is an FTIR based analyzer capable of ppb to ppm sensitivity for multiple gas species in a variety of applications, such as stack emissions monitoring, process monitoring, ambient air monitoring, purity monitorin... Read more...

Mass Flow Controllers & Mass Flow Meters - Mass Flow Controller Products from MKS Instruments Enabling our customers to bring their products and processes to market faster, more reliably, and more cost effectively is at the heart o... Read more...

The Type 146 Cluster Gauge is a versatile half-rack vacuum gauge measurement and control system which powers and provides simultaneous readout for up to four different vacuum gauges or mass flow controllers. Vacuum gauges supported are: Ba... Read more...