Application Note: Ultratrace Measurement of Calcium in Ultrapure Water Using the Agilent 8800 Triple Quadrupole ICP-MS
5 March 2013

In the semiconductor industry, the control of metal impurities in the process chemicals used in the manufacture of semiconductor devices is critical to achieve the required product performance and yield. This application note describes the theory and operation of the Agilent 8800 ICP-QQQ to achieve the sub-ppt measurement of Ca in ultra pure water (UPW).