Fabrication of Plasmonic Devices by Helium Ion Microscopy
21 January 2018

Engineering the size, shape, and composition of a material can produce a desired optical response to excitation, which could then be incorporated into a device. The ability to make nanostructures with the required shape fidelity is critical to device performance. In this application note, the nanofabrication of plasmonic devices by helium ion microscopy is detailed.